High temperature micro-glassblowing process demonstrated on fused quartz and ULE TSG
نویسندگان
چکیده
منابع مشابه
Titania Silicate / Fused Quartz Glassblowing for 3-d Fabrication of Low Internal Loss Wineglass Micro-structures
We report, for the first time, a fabrication process for building highly smooth, symmetric 3-D dynamic wineglass structures using low internal loss materials, namely fused quartz and ultra low expansion titania silicate glass (ULE TSG). The approach consists of a high temperature (at 1650 °C) micro-glassblowing process and a novel inverted-wineglass architecture that provides self-aligned stem ...
متن کاملElectrical and optical measurements on fused quartz under shock compression
The resistivities of specimens of Si02 (fused quartz) singly and doubly shocked in the i0 to 45 and 27 to 90 GPa range, respectively, demonstrate a marked decrease from values of ~10~'m to ~0.1~'m at single shock pressure of ~40 and double shock pressure of ~74 GPa. The shock-induced polarization profiles also show a sudden change of electrical properties of the material at those pressures. The...
متن کاملThe Effect of Micro Turbulence on Quartz Flotation Rate
In this research, the effect of micro turbulence on the flotation rate of quartz particles was investigated. The maximum particle Reynolds number (Rep) was obtained at 60.25 with a particle size of -500+420 µm, impeller speed of 900 rpm, bubble surface area flux of 10.21 1/s and micro scale turbulence size of 162 µm. When the micro turbulence size was equal to the particle size, ...
متن کاملElectrical measurements on fused quartz under shock compression
The resistivities of specimens ofSi02 (fused quartz) singly and doubly shocked in the 10-45 and 27-90 GPa ranges, respectively, demonstrate a marked decrease from values of10-0.1 11-m at a single-shock pressure of -40 and a double-shock pressure of 7 4 G Pa. These states correspond to calculated shock temperatures of3300 and -3600 K, respectively. At shock pressures below 36 GPa the measured re...
متن کامل1 Million Q-factor Demonstrated on Micro-glassblown Fused Silica Wineglass Resonators with Out-of-plane Electrostatic Transduction
In this paper, for the first time, we report Q-factor over 1 million, on both modes, and high frequency symmetry (∆f/f ) of 132 ppm on wafer-level micro-glassblown 3-D fused silica wineglass resonators at a compact size of 7 mm diameter and center frequency of 105 kHz. In addition, we demonstrate for the first time, out-ofplane capacitive transduction on MEMS wineglass resonators. High Q-factor...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2013
ISSN: 0924-4247
DOI: 10.1016/j.sna.2012.11.040